کلیدواژه ها = CF4 Etchant | ||
تعداد مقالات: 1 | ||
1 | Modeling and simulation of dielectric barrier discharge with CF4 etching gas by Comsol Multiphysics | |
Nikoo Darestani Farahani؛ fereydoun abbasi؛ mohammad askari | ||
مشاهده مقاله | اصل مقاله (481.64 K) |
کلیدواژه ها = CF4 Etchant | ||
تعداد مقالات: 1 | ||
1 | Modeling and simulation of dielectric barrier discharge with CF4 etching gas by Comsol Multiphysics | |
Nikoo Darestani Farahani؛ fereydoun abbasi؛ mohammad askari | ||
مشاهده مقاله | اصل مقاله (481.64 K) |