Siliconization of Molybdenum using glow discharge method

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عنوان دوره: اولین دوره بین المللی و بیست و هشتمین دوره ملی (1400)
Silicon film has been deposited on molybdenum at room temperature by a mixture of silane and He gas using the glow discharge method as an application of a low-Z protective material to a fusion reactor. The thickness of the coating is estimated to be around 450 nm. The films have been characterized by using scanning electron microscopy, EDX, X-ray diffraction, FTIR, and AFM.
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